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½Ç³» ¼öºÐ¹« °¡½À ¹æ½Ä Ŭ¸°·ëÀÇ °øÁ¶¿¡³ÊÁö ½ÇÇè / An Experiment on Air Conditioning Energy in an Indoor Water Spray Humidification Type Cleanroom / Æ÷½ºÅ͹ßÇ¥ - 16.°ø±âûÁ¤/Ŭ¸°·ë |
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¼Û¿øÀÏ(Won-Il Song) ; ¹Ú¼öºó(Su-Bin Park) ; ±è±âö(Ki-Cheol Kim) ; À¯°æÈÆ(Kyung-Hoon Yoo) ; ŰæÀÀ(Kyung-Eung Tae) ; ±è¿ë½Ä(Yong-Sik Kim) ; ±Ç¿À¸í(Oh-Myung Kwon) |
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´ëÇѼ³ºñ°øÇÐȸ 2017³âµµ ÇϰèÇмú¹ßÇ¥´ëȸ (2017-06) |
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½ÃÀÛÆäÀÌÁö(1043) ÃÑÆäÀÌÁö(4) |
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Ŭ¸°·ë ; °øÁ¶¿¡³ÊÁö ; ½Ç³»¼öºÐ¹« °¡½À ; Cleanroom ; Air conditioning energy ; Indoor water spray humidification |
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In high-tech electronic device manufacturing cleanrooms such as semiconductor and display, they use huge amounts of energy to maintain cleanroom environment. Because the energy consumption of outdoor air conditioning system represents about 45% of the total air conditioning load, analysis on total cleanroom energy consumption is much worth from energy saving viewpoint. In the present study, an experiment was carried out to evaluate air conditioning energy in a model cleanroom using an indoor water spray humidification system with an outdoor air volume of 3,000 m3/h, which is located in Ansan, Korea. Therefore we analyze the energy consumption about seasonal energy characteristic to indoor water spray humidification system cleanroom. The experimental results showed that the indoor water spray humidification system was more energy-efficient than the existing steam humidification system. |